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Tantalum Carbide Coating

VeTek semiconductor is a leading manufacturer of Tantalum Carbide Coating materials for the semiconductor industry. Our main product offerings include CVD tantalum carbide coating parts, sintered TaC coating parts for SiC crystal growth or semiconductor epitaxy process. Passed ISO9001, VeTek Semiconductor has good control on quality. VeTek Semiconductor is dedicated to become innovator in Tantalum Carbide Coating industry through ongoing research and development of iterative technologies.


The main products are TaC Coated Guide Ring, CVD TaC coated three-petal guide ring, Tantalum Carbide TaC Coated Halfmoon, CVD TaC coating planetary SiC epitaxial susceptor, Tantalum Carbide Coating Ring, Tantalum Carbide Coated Porous Graphite, TaC Coating Rotation Susceptor, Tantalum Carbide Ring, TaC Coating Rotation Plate, TaC coated wafer susceptor, TaC Coated Deflector Ring, CVD TaC Coating Cover, TaC Coated Chuck etc., the purity is below 5ppm, can meet customer requirements.


TaC coating graphite is created by coating the surface of a high-purity graphite substrate with a fine layer of tantalum carbide by a proprietary Chemical Vapor Deposition (CVD) process.The advantage is showed in below picture:


Excellent properties of TaC coating graphite


The tantalum carbide (TaC) coating has gained attention due to its high melting point of up to 3880°C, excellent mechanical strength, hardness, and resistance to thermal shocks, making it an attractive alternative to compound semiconductor epitaxy processes with higher temperature requirements, such as Aixtron MOCVD system and LPE SiC epitaxy process.It also has a wide application in PVT method SiC crystal growth process.


Key Features:

 ● Temperature stability

 ● Ultra high purity

 ● Resistance to H2, NH3, SiH4,Si

 ● Resistance to thermal stock

 ● Strong adhesion to graphite

 ● Conformal coating coverage

 ● Size up to 750 mm diameter(The only manufacturer in China reaches this size)


Applications:

 ● Wafer carrier

 ● Inductive heating susceptor

 ● Resistive heating element

 ● Satellite disk

 ● Shower head

 ● Guide ring

 ● LED Epi susceptor

 ● Injection nozzle

 ● Masking ring

 ● Heat shield


Tantalum carbide (TaC) coating on a microscopic cross-section:


the microscopic cross-section of Tantalum carbide (TaC) coating


Parameter of VeTek Semiconductor Tantalum Carbide Coating:

Physical properties of TaC coating
Density 14.3 (g/cm³)
Specific emissivity 0.3
Thermal expansion coefficient 6.3 10-6/K
Hardness (HK) 2000 HK
Resistance 1×10-5 Ohm*cm
Thermal stability <2500℃
Graphite size changes -10~-20um
Coating thickness ≥20um typical value (35um±10um)


TaC coating EDX data：

EDX data of TaC coating


TaC coating crystal structure data:

Element Atomic percent
Pt. 1 Pt. 2 Pt. 3 Average
C K 52.10 57.41 52.37 53.96
Ta M 47.90 42.59 47.63 46.04


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Tantalum Carbide Ring

Tantalum Carbide Ring

As an advanced manufacturer and producer of Tantalum Carbide Ring products in China, VeTek Semiconductor Tantalum Carbide Ring has extremely high hardness, wear resistance, high temperature resistance and chemical stability, and is widely used in the semiconductor manufacturing field. Especially in CVD, PVD, ion implantation process, etching process, and wafer processing and transportation, it is an indispensable product for semiconductor processing and manufacturing. Looking forward to your further consultation.
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Tantalum Carbide Coating Support

Tantalum Carbide Coating Support

As a professional Tantalum Carbide Coating Support product manufacturer and factory in China, VeTek Semiconductor Tantalum Carbide Coating Support is usually used for surface coating of structural components or support components in semiconductor equipment, especially for surface protection of key equipment components in semiconductor manufacturing processes such as CVD and PVD. Welcome your further consultation.
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Tantalum Carbide Guide Ring

Tantalum Carbide Guide Ring

VeTek Semiconductor is a professional manufacturer and leader of Tantalum Carbide Guide Ring products in China. Our Tantalum Carbide (TaC) Guide Ring is a high-performance ring component made of tantalum carbide, which is commonly used in semiconductor processing equipment, especially in high-temperature and highly corrosive environments such as CVD, PVD, etching and diffusion. VeTek Semiconductor is committed to providing advanced technology and product solutions for the semiconductor industry, and welcomes your further inquiries.
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TaC Coating Rotation Susceptor

TaC Coating Rotation Susceptor

As a professional manufacturer, innovator and leader of TaC Coating Rotation Susceptor products in China. VeTek Semiconductor TaC Coating Rotation Susceptor is usually installed in chemical vapor deposition (CVD) and molecular beam epitaxy (MBE) equipment to support and rotate wafers to ensure uniform material deposition and efficient reaction. It is a key component in semiconductor processing. Welcome your further consultation.
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CVD TaC Coating Crucible

CVD TaC Coating Crucible

VeTek Semiconductor is a professional manufacturer and leader of CVD TaC Coating Crucible products in China. CVD TaC Coating Crucible is based on tantalum carbon (TaC) coating. The tantalum carbon coating is evenly covered on the surface of the crucible through chemical vapor deposition (CVD) process to enhance its heat resistance and corrosion resistance. It is a material tool specially used in high temperature extreme environments. Welcome your further consultation.
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CVD TaC Coating Wafer Carrier

CVD TaC Coating Wafer Carrier

As a professional CVD TaC Coating Wafer Carrier product manufacturer and factory in China, VeTek Semiconductor CVD TaC Coating Wafer Carrier is a wafer carrying tool specially designed for high temperature and corrosive environments in semiconductor manufacturing. and CVD TaC Coating Wafer Carrier has high mechanical strength, excellent corrosion resistance and thermal stability, providing the necessary guarantee for manufacturing high-quality semiconductor devices. Your further inquiries are welcome.
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As a professional Tantalum Carbide Coating manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable Tantalum Carbide Coating made in China, you can leave us a message.
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