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Tantalum Carbide Coating

VeTek semiconductor is a leading manufacturer of Tantalum Carbide Coating materials for the semiconductor industry. Our main product offerings include CVD tantalum carbide coating parts, sintered TaC coating parts for SiC crystal growth or semiconductor epitaxy process. Passed ISO9001, VeTek Semiconductor has good control on quality. VeTek Semiconductor is dedicated to become innovator in Tantalum Carbide Coating industry through ongoing research and development of iterative technologies.


The main products are TaC Coated Guide Ring, CVD TaC coated three-petal guide ring, Tantalum Carbide TaC Coated Halfmoon, CVD TaC coating planetary SiC epitaxial susceptor, Tantalum Carbide Coating Ring, Tantalum Carbide Coated Porous Graphite, TaC Coating Rotation Susceptor, Tantalum Carbide Ring, TaC Coating Rotation Plate, TaC coated wafer susceptor, TaC Coated Deflector Ring, CVD TaC Coating Cover, TaC Coated Chuck etc., the purity is below 5ppm, can meet customer requirements.


TaC coating graphite is created by coating the surface of a high-purity graphite substrate with a fine layer of tantalum carbide by a proprietary Chemical Vapor Deposition (CVD) process.The advantage is showed in below picture:


Excellent properties of TaC coating graphite


The tantalum carbide (TaC) coating has gained attention due to its high melting point of up to 3880°C, excellent mechanical strength, hardness, and resistance to thermal shocks, making it an attractive alternative to compound semiconductor epitaxy processes with higher temperature requirements, such as Aixtron MOCVD system and LPE SiC epitaxy process.It also has a wide application in PVT method SiC crystal growth process.


Key Features:

 ● Temperature stability

 ● Ultra high purity

 ● Resistance to H2, NH3, SiH4,Si

 ● Resistance to thermal stock

 ● Strong adhesion to graphite

 ● Conformal coating coverage

 ● Size up to 750 mm diameter(The only manufacturer in China reaches this size)


Applications:

 ● Wafer carrier

 ● Inductive heating susceptor

 ● Resistive heating element

 ● Satellite disk

 ● Shower head

 ● Guide ring

 ● LED Epi susceptor

 ● Injection nozzle

 ● Masking ring

 ● Heat shield


Tantalum carbide (TaC) coating on a microscopic cross-section:


the microscopic cross-section of Tantalum carbide (TaC) coating


Parameter of VeTek Semiconductor Tantalum Carbide Coating:

Physical properties of TaC coating
Density 14.3 (g/cm³)
Specific emissivity 0.3
Thermal expansion coefficient 6.3 10-6/K
Hardness (HK) 2000 HK
Resistance 1×10-5 Ohm*cm
Thermal stability <2500℃
Graphite size changes -10~-20um
Coating thickness ≥20um typical value (35um±10um)


TaC coating EDX data：

EDX data of TaC coating


TaC coating crystal structure data:

Element Atomic percent
Pt. 1 Pt. 2 Pt. 3 Average
C K 52.10 57.41 52.37 53.96
Ta M 47.90 42.59 47.63 46.04


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TaC Coating Rotation Susceptor

TaC Coating Rotation Susceptor

As a professional manufacturer, innovator and leader of TaC Coating Rotation Susceptor products in China. VeTek Semiconductor TaC Coating Rotation Susceptor is usually installed in chemical vapor deposition (CVD) and molecular beam epitaxy (MBE) equipment to support and rotate wafers to ensure uniform material deposition and efficient reaction. It is a key component in semiconductor processing. Welcome your further consultation.
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CVD TaC Coating Crucible

CVD TaC Coating Crucible

VeTek Semiconductor is a professional manufacturer and leader of CVD TaC Coating Crucible products in China. CVD TaC Coating Crucible is based on tantalum carbon (TaC) coating. The tantalum carbon coating is evenly covered on the surface of the crucible through chemical vapor deposition (CVD) process to enhance its heat resistance and corrosion resistance. It is a material tool specially used in high temperature extreme environments. Welcome your further consultation.
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CVD TaC Coating Wafer Carrier

CVD TaC Coating Wafer Carrier

As a professional CVD TaC Coating Wafer Carrier product manufacturer and factory in China, VeTek Semiconductor CVD TaC Coating Wafer Carrier is a wafer carrying tool specially designed for high temperature and corrosive environments in semiconductor manufacturing. and CVD TaC Coating Wafer Carrier has high mechanical strength, excellent corrosion resistance and thermal stability, providing the necessary guarantee for manufacturing high-quality semiconductor devices. Your further inquiries are welcome.
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TaC Coating Heater

TaC Coating Heater

VeTek Semiconductor TaC Coating Heater has an extremely high melting point (about 3880°C). The high melting point enables it to operate at extremely high temperatures, especially in the growth of gallium nitride (GaN) epitaxial layers in the metal organic chemical vapor deposition (MOCVD) process. VeTek Semiconductor is committed to providing customers with customized product solutions. We look forward to hearing from you.
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CVD TAC Coating

CVD TAC Coating

VeTek Semiconductor is china leading CVD TAC Coating products manufacturer. For many years, we have been focusing on various CVD TAC Coating products like CVD TaC coating cover, CVD TaC Coating Ring. VeTek Semiconductor supports customized product services and satisfactory product prices, and looks forward to your further consultation.
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TaC Coated Chuck

TaC Coated Chuck

With its high temperature resistance, chemical inertness and excellent performance, VeTek Semiconductor's TaC coated chucks are designed for semiconductor furnaces. We believe that our products can bring you advanced technology and quality product solutions.
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As a professional Tantalum Carbide Coating manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable Tantalum Carbide Coating made in China, you can leave us a message.
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