Silicon Carbide Coating

Vetek Semiconductor's CVD SiC Coating Protector used is LPE SiC epitaxy, The term "LPE" usually refers to Low Pressure Epitaxy (LPE) in Low Pressure Chemical Vapor Deposition (LPCVD). In semiconductor manufacturing, LPE is an important process technology for growing single crystal thin films, often used to grow silicon epitaxial layers or other semiconductor epitaxial layers.Pls no hesitate to contact us for more questions.

Vetek Semiconductor is professional in fabricating CVD SiC coating, TaC coating on graphite and silicon carbide material. We provide OEM and ODM products like SiC Coated Pedestal,wafer carrier, wafer chuck, wafer carrier tray, planetary disk and so on.With 1000 grade clean room and purification device,we can provide you products with impurity below 5ppm.Looking forward to hearing from you soon.

Vetek Semiconductor excels in collaborating closely with clients to craft bespoke designs for SiC Coating Inlet Ring tailored to specific needs. These SiC Coating Inlet Ring are meticulously engineered for diverse applications such as CVD SiC equipment and Silicon carbide epitaxy. For tailored SiC Coating Inlet Ring solutions, do not hesitate to reach out to Vetek Semiconductor for personalized assistance.

VeTek Semiconductor is a professional China manufacturer and supplier, mainly producing SiC coated support rings, CVD silicon carbide (SiC) coatings, tantalum carbide (TaC) coatings. We are committed to providing perfect technical support and ultimate product solutions for the semiconductor industry, welcome to contact us.

Wafer chunk a wafer clamping tool in semiconductor process and is widely used in PVD, CVD, ETCH and other process.Vetek Semiconductor's wafer chuck play pivotal roles in semiconductor production, enabling fast, high-quality output. With in-house manufacturing, competitive pricing, and robust R&D support, Vetek Semiconductor excels in OEM/ODM services for precision components.Looking forward to your inquiry.

ALD process,means Atomic Layer Epitaxy process. Vetek Semiconductor and ALD system manufacturers have developed and produced SiC coated ALD Planetary Susceptors that meet the high requirements of the ALD process to evenly distribute the airflow over the substrate. At the same time, our high purity CVD SiC coating ensures purity in the process. Welcome to discuss cooperation with us.