CVD SiC Coating Graphite Parts Cleaning Service

1. Challenges You May Be Facing

• AlN Layer Hard to Remove: 1300°C thermal clean still cannot effectively etch residual AlN layer.

• Recurring Memory Effect: Surface memory effect causes unstable gas flow in the reactor, impacting process consistency.

• Cleaning Cycle Impacts Throughput: Typically every 16 process cycles (4–5 susceptors) need external cleaning.

• Concern About Damaging Costly Coating: Lack of in-house chemical cleaning experience makes operators hesitant to attempt aggressive cleaning.

2. Our Solution – Designed for GaN / AlN / AlGaN Processes

• Professional Cleaning: Custom process specifically developed for CVD SiC coated graphite parts. No chemical formula required from the customer.

• Coating Safety: Strictly protects the 100 µm CVD SiC coating. Absolute zero thickness loss after cleaning.

• Verifiable Results: Full Certificate of Analysis (COA) covering five core dimensions. Data ready for archive and quality audit.

3. Five Core Acceptance Criteria

Strictly aligned with the critical requirements of semiconductor epitaxy users:

1. Zero Coating Loss – SiC coating thickness is never reduced after cleaning (pre/post thickness comparison verification).

2. No Surface Deformation – Flatness and geometric accuracy are strictly inspected to ensure no physical deformation.

3. Eliminate Memory Effect – XPS analysis for Al/Ga residual confirms thorough removal of memory effect sources.

4. Zero Metal Residue – ICP-MS testing for Fe, Cu, Ni and other metals verifies zero residual metallic impurities.

5. No Excess Particles – QIII particle test plus cleanliness verification prevent gas flow instability caused by residual particles.

4. Delivery Inspection & COA Report

Every batch is delivered with full verification data across five core dimensions:

5. Applicable Products & Process Background

Product Parameters

Service Process

1. Inquiry – Send part photos / model / quantity for evaluation.

2. Quotation – Technical evaluation and detailed cleaning proposal with quotation.

3. Shipping – Ship parts to us or arrange pickup service.

4. Cleaning – Professional cleaning + full multi-dimension inspection.

5. Report – COA report issued and cleaned parts returned.

6. Follow-up – Effect tracking and ongoing technical support.

6. Why Choose VETEK Cleaning Service?

VETEK combines deep expertise in CVD SiC coating technology with specialized cleaning capabilities for high-value graphite susceptors. We understand the critical importance of coating integrity, particle control, and process purity in GaN/AlN epitaxy. Our service is designed for customers who require absolute safety for expensive CVD SiC coatings while completely solving memory effect and gas-flow instability issues.

· Trial cleaning available for small-batch verification

· Full COA report provided with every delivery

· Zero risk of coating damage or new contamination

· Professional · Safe · Verifiable