This AMAT 0200-03201 Wafer Lift Pin from VeTek starts with high-purity graphite, then we add a dense CVD SiC coating on top. It’s made for 300mm epitaxy systems and Applied Materials EPI reactors. Why graphite and SiC? Graphite handles heat really well. The SiC layer takes on corrosive gases and doesn’t wear out fast. The thin wall design? That’s for cleaner wafer lifting and positioning, fewer particles, and longer part life under high temperatures. We also make similar SiC coated graphite parts for ASM, Aixtron, and LPE systems. Looking forward to your inquiry.
● High-purity graphite core + CVD SiC coating – built for real semiconductor production.
● Handles high-temperature epitaxy runs without losing mechanical stability cycle after cycle.
● Thin wall shape cuts down thermal mass and improves wafer handling precision.
● SiC layer stands up to aggressive process gases and chemical cleaning.
● Smooth, uniform coating means less particle shedding and more stable processing.We hold tight tolerances with CNC machining for critical semiconductor parts.
For inquiries about Silicon Carbide Coating, Tantalum Carbide Coating, Special Graphite or price list, please leave your email to us and we will be in touch within 24 hours.
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