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China Plasma Resistant Component Manufacturer, Supplier, Factory

Assume full responsibility to satisfy all needs of our clients; achieve continual advancements by endorsing the expansion of our purchasers; turn into the final permanent cooperative partner of clientele and maximize the interests of clients for Plasma Resistant Component, Solid SiC Focus Ring, SiC Focus Ring, Silicon Carbide Focus Ring, Semiconductor Focus Ring, Customers' profit and pleasure are constantly our biggest goal. You should contact us. Give us a probability, offer you a surprise.
Plasma Resistant Component, In order to meet our market demands, we now have paied more attention to the quality of our products and solutions and services. Now we can meet customers' special requirements for special designs. We persistently develop our enterprise spirit "quality lives the enterprise, credit assures cooperation and keep the motto in our minds: customers first.

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  • CVD SiC Coated Graphite Shower Head

    CVD SiC Coated Graphite Shower Head

    The CVD SiC Coated Graphite Shower Head from Veteksemicon is a high-performance component specifically designed for semiconductor chemical vapor deposition (CVD) processes. Manufactured from high-purity graphite and protected with a chemical vapor deposition (CVD) silicon carbide (SiC) coating, this shower head delivers outstanding durability, thermal stability, and resistance to corrosive process gases. Looking forward to your further consultation.
  • Quartz Wafer Boats

    Quartz Wafer Boats

    Our Quartz Wafer Boats are high-purity wafer carrier solution tailored for semiconductor, LED, solar cell, and battery manufacturing processes. Engineered to endure high temperatures and chemically aggressive environments, this quartz boat features low thermal expansion, excellent electrical insulation, and long-term dimensional stability. Ideal for diffusion, oxidation, and LPCVD processes, it supports precise wafer alignment and is available in various sizes to meet different equipment requirements.
  • High purity SiC wafer boat carrier

    High purity SiC wafer boat carrier

    VeTek Semiconductor offers customized High purity SiC wafer boat carrier. Made of high purity silicon carbide, it features slots to hold the wafer in place, preventing it from sliding during processing. CVD SiC coating is also available if required. As a professional and strong semiconductor manufacturer and supplier, VeTek Semiconductor's High purity SiC wafer boat carrier is price competitive and high quality. VeTek Semiconductor looks forward to being your long-term partner in China.
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    In the growth of SiC and AlN single crystals using the physical vapor transport (PVT) method, crucial components such as the crucible, seed holder, and guide ring play a vital role. As depicted in Figure 2 [1], during the PVT process, the seed crystal is positioned in the lower temperature region, while the SiC raw material is exposed to higher temperatures (above 2400 ℃).

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    During the SiC epitaxial growth process, SiC coated graphite suspension failure may occur. This paper conducts a rigorous analysis of the failure phenomenon of SiC coated graphite suspension, which mainly includes two factors: SiC epitaxial gas failure and SiC coating failure.

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