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SiC Ceramics Wafer Boat
  • SiC Ceramics Wafer BoatSiC Ceramics Wafer Boat

SiC Ceramics Wafer Boat

VeTek semiconductor is a leading SiC Ceramics Wafer Boat supplier, manufacturer and factory in China. Our SiC Ceramics Wafer Boat is a vital component in advanced wafer handling processes, catering to the photovoltaic, electronics, and semiconductor industries. Looking forward to your consultation.

VeTek semiconductor SiC Ceramics Wafer Boat exemplifies cutting-edge innovation in silicon carbide technology, offering a robust solution for high-performance wafer processing. Its silicon carbide construction ensures outstanding durability and exceptional resistance to thermal stress, enabling it to endure the extreme conditions of modern manufacturing environments. From high temperatures to harsh plasma bombardment, the Silicon Carbide wafer Boat maintains its structural integrity, ensuring consistent and reliable operation over prolonged periods.

SiC Ceramics Wafer Boat working diagram


Engineered for superior performance, the SiC Ceramics Wafer Boat demonstrates remarkable resistance to chemical corrosion, making it ideal for applications requiring exposure to aggressive chemicals and reactive plasma. This attribute is critical for processes such as diffusion, oxidation, and annealing, where maintaining material purity and stability is paramount. The SiC Ceramics Wafer Boat's ability to resist wear and deformation further enhances its appeal, ensuring it remains a dependable asset in demanding wafer production scenarios.


With excellent thermal conductivity, the SiC Wafer Boat efficiently dissipates heat, promoting uniform temperature distribution during wafer processing. This property is particularly beneficial in crystal growth and other temperature-sensitive operations, minimizing risks of wafer damage and contributing to enhanced product yields. Its high load-bearing capacity allows it to accommodate significant wafer loads without bending or warping, ensuring precise alignment and handling throughout the production process.


In photovoltaic cell production, the SiC Boat supports critical stages such as crystal growth and diffusion, contributing to improved energy conversion efficiency. In semiconductor fabrication, it’s a key component in maintaining the high purity required for next-generation devices. Furthermore, its role in electronics manufacturing underscores its versatility and reliability in achieving optimal production outcomes.


Compared to conventional materials like graphite and ceramics, the SiC Silicon Carbide Ceramics Wafer Boat offers unparalleled advantages. Its longevity and resistance to mechanical wear significantly reduce maintenance requirements and operational interruptions, resulting in cost savings and enhanced productivity. The material’s high thermal and chemical stability ensure it outperforms alternatives in a variety of challenging environments.


VeTek semiconductor understands that every manufacturing process has unique requirements. That's why we offer comprehensive customization options for the SiC Ceramics Wafer Boat, including tailored dimensions, structural designs, and other specific features. This adaptability ensures seamless integration into diverse manufacturing setups, enabling optimal performance tailored to your specific needs.


Choosing VeTek semiconductor means partnering with a company committed to pushing the boundaries of silicon carbide innovation. With a strong emphasis on quality, performance, and customer satisfaction, we deliver products that not only meet but exceed the rigorous demands of the semiconductor industry. Let us help you achieve greater efficiency, reliability, and success in your operations with our advanced SiC Silicon Carbide Ceramics Wafer Boat solutions.


Physical properties of Recrystallized Silicon Carbide

Physical properties of Recrystallized Silicon Carbide
PropertyTypical Value Typical Value
Working temperature (°C)
1600°C (with oxygen), 1700°C (reducing environment)
SiC content
> 99.96%
Free Si content
< 0.1%
Bulk density
2.60-2.70 g/cm3
Apparent porosity
< 16%
Compression strength
> 600 MPa
Cold bending strength
80-90 MPa (20°C)
Hot bending strength
90-100 MPa (1400°C)
Thermal expansion @1500°C
4.70 10-6/°C
Thermal conductivity @1200°C
23 W/m•K
Elastic modulus
240 GPa
Thermal shock resistance
Extremely good

VeTek semiconductor SiC Ceramics Wafer Boat products shops

sic coated Graphite substrateSiC Ceramics Wafer Boat testSilicon carbide ceramic processingSemiconductor process equipment

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