Solid Silicon Carbide Focusing Ring

The Veteksemicon Solid Silicon Carbide Focusing Ring is a pivotal component in semiconductor manufacturing, strategically positioned outside the wafer to maintain direct contact. By utilizing an applied voltage, this ring focuses the plasma traversing it, thereby enhancing the process uniformity on the wafer. Constructed solely from Chemical Vapor Deposition Silicon Carbide (CVD SiC), this focusing ring embodies the exceptional qualities demanded by the semiconductor industry. We at Veteksemicon are dedicated to manufacturing and supplying high-performance Solid Silicon Carbide Focusing Rings that fuse premium quality with cost-efficiency.

Product Advantages

Compared to traditional Silicon (Si) or Sintered Silicon Carbide (Sintered SiC) focus rings, our product excels in key dimensions:

Notably, silicon carbide’s conductivity and resistance to ion etching are closely akin to silicon, ensuring compatibility with existing semiconductor manufacturing processes while delivering enhanced performance—making the Veteksemicon Solid Silicon Carbide Focusing Ring an ideal material choice for this critical application.

The Veteksemicon Solid Silicon Carbide Focusing Ring stands as a state-of-the-art solution in the realm of semiconductor manufacturing. It fully leverages the unique material advantages of  CVD SiC to facilitate reliable, high-precision, and high-efficiency etching processes, significantly contributing to the advancement of next-generation semiconductor technology.