Industry News

In-depth analysis of the causes of edge yellowing and peeling of silicon carbide coating on MOCVD epitaxy graphite susceptors. VeTek eliminated micro-stress by precisely controlling the initial CVD deposition rate and flow field, increasing coating yield from 50% to 90% and extending the service life of high-purity graphite parts.

Addressing 1.4% pocket-to-pocket thickness variation in multi-pocket silicon epitaxy graphite susceptors, VeTek Semi improved susceptor flatness to <0.08mm and reduced variation to 0.69% via CVD flow field simulation and ultra-precision SiC coating, boosting wafer yield.

Learn how Vetek eliminated radial cracking in large-size MOCVD SiC-coated graphite susceptors. Structural stress buffer redesign & CTE matching increased service life by 300%+.