Products

Silicon Epitaxy

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EPI Susceptor Parts

EPI Susceptor Parts

In the core process of silicon carbide epitaxial growth, Veteksemicon understands that susceptor performance directly determines the quality and production efficiency of the epitaxial layer. Our high-purity EPI susceptors, designed specifically for the SiC field, utilize a special graphite substrate and a dense CVD SiC coating. With their superior thermal stability, excellent corrosion resistance, and extremely low particle generation rate, they ensure unparalleled thickness and doping uniformity for customers even in harsh high-temperature process environments. Choosing Veteksemicon means choosing the cornerstone of reliability and performance for your advanced semiconductor manufacturing processes.
SiC coating Monocrystalline silicon epitaxial tray

SiC coating Monocrystalline silicon epitaxial tray

SiC coating Monocrystalline silicon epitaxial tray is an important accessory for monocrystalline silicon epitaxial growth furnace, ensuring minimal pollution and stable epitaxial growth environment. VeTek Semiconductor's SiC coating Monocrystalline silicon epitaxial tray has an ultra-long service life and provides a variety of customization options. VeTek Semiconductor looks forward to becoming your long-term partner in China.
CVD SiC coating barrel susceptor

CVD SiC coating barrel susceptor

VeTek Semiconductor CVD SiC coating barrel susceptor is the core component of the barrel type epitaxial furnace.With the help of CVD SiC coating barrel susceptor, the quantity and quality of epitaxial growth are greatly improved.VeTek Semiconductor is a professional manufacturer and supplier of SiC Coated Barrel Susceptor, and is at the leading level in China and even in the world.VeTek Semiconductor looks forward to establishing a close cooperative relationship with you in the semiconductor industry.
Graphite Rotating Susceptor

Graphite Rotating Susceptor

High purity graphite rotating susceptor plays an important role in the epitaxial growth of gallium nitride (MOCVD process). VeTek Semiconductor is a leading graphite rotating susceptor manufacturer and supplier in China. We have developed many high-purity graphite products based on high-purity graphite materials, which fully meet the requirements of the semiconductor industry. VeTek Semiconductor looks forward to becoming your partner in Rotating Graphite susceptor.
CVD SiC Pancake Susceptor

CVD SiC Pancake Susceptor

As a leading manufacturer and innovator of CVD SiC Pancake Susceptor products in China. VeTek Semiconductor CVD SiC Pancake Susceptor, as a disc-shaped component designed for semiconductor equipment, is a key element to support thin semiconductor wafers during high-temperature epitaxial deposition. VeTek Semiconductor is committed to providing high-quality SiC Pancake Susceptor products and becoming your long-term partner in China at competitive prices.
CVD SiC Coated Barrel Susceptor

CVD SiC Coated Barrel Susceptor

VeTek Semiconductor is a leading manufacturer and innovator of CVD SiC Coated graphite Susceptor in China. Our CVD SiC Coated Barrel Susceptor plays a key role in promoting the epitaxial growth of semiconductor materials on wafers with its excellent product characteristics. Welcome to your further consultation.

Veteksemicon silicon epitaxy solutions are your strategic procurement choice for advanced semiconductor wafer processing, particularly in CMOS, power devices, and MEMS applications. As a key process in wafer engineering, silicon epitaxy (Si Epi) involves the precise deposition of a crystalline silicon layer on top of a polished silicon wafer, offering superior control of doping profiles, defect density, and layer thickness.


Veteksemicon provides epitaxy-ready susceptor parts and reactor components used in Epi CVD systems, supporting both atmospheric and reduced pressure processes. Our product lineup includes silicon epitaxy susceptors, carrier rings, and coated wafer holders, optimized for compatibility with tools from Applied Materials, ASM, and Tokyo Electron (TEL).


Silicon epitaxy plays a critical role in producing ultra-thin junctions, strained silicon layers, and high-voltage isolation structures. Our materials and parts are engineered for high-purity, uniform thermal distribution, and anti-contamination performance during n-type and p-type epitaxial growth.


Closely associated terms include epitaxial wafer, in-situ doping, epitaxy-ready SiC coatings, and epi reactor parts, which support the entire upstream and downstream process of silicon-based IC fabrication.


Discover more about Veteksemicon’s silicon epitaxy support solutions by visiting our product detail page or contacting us for technical consultation and part customization.


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