China Epi Wafer Chuck Manufacturer, Supplier, Factory

Veteksemicon’s SiC Block is designed for high-efficiency grinding and thinning of silicon and sapphire wafers. With excellent thermal conductivity (≥120 W/m·K), high thermal shock resistance, and superior wear resistance (Mohs ≥9), our blocks improve process stability and reduce tool change frequency. Available in sizes from 120mm to 480mm, with customized options and fast delivery to meet diverse production needs.

Pyrolytic carbon coatings are widely applied to rigid felt. VeTek Semiconductor is a leading manufacturer of customized PyC Coating Rigid Felt Ring in China, specializing in advanced materials for many years. Our PyC Coating Rigid Felt Ring have dense surface and high purity. With 2 laboratories and 12 production lines, thousand-grade and hundred-grade production workshops in our factory, welcome to visit us.

Designed to surround the wafer tracking zone, the Solid SiC Focus Ring ensures linear plasma distribution and exact edge-to-center etch profiles.These premium β-SiC components are built by Vetek Semiconductor (Wuyi Tianyao New Material Technology Co., LTD) using proprietary Chemical Vapor Deposition (CVD) technology. By vaporizing raw materials into a dense, binderless matrix, Vetek eliminates the porous micro-gaps common in older materials. Compared to standard quartz or silicon shielding, our CVD SiC components stand up far better to corrosive halogen gases, shielding the wafer in deep sub-7nm logic and dense memory chip manufacturing.Looking forward to your further inquiry.

As one of the leading TaC coating product suppliers in China, VeTek Semiconductor is able to provide customers with high-quality TaC coating customized parts. TaC coated ring for PVT growth of SiC single crystal is one of VeTek Semiconductor's most outstanding and mature products. It plays an important role in the PVT growth of SiC crystal process and can help customers grow high-quality SiC crystals. Looking forward to your inquiry.

As a core consumable in the semiconductor manufacturing process, Porous Graphite plays an irreplaceable role in multiple links such as crystal growth, doping, and annealing. As a professional manufacturer of Porous Graphite, VeTek Semiconductor is committed to providing high-quality Porous Graphite products at competitive prices, welcome your further inquiry.

VeTek Semiconductor specializes in providing high-quality wafer boats, pedestals and custom wafer carriers in vertical/column and horizontal configurations to meet various semiconductor process requirements. As a leading manufacturer and supplier of silicon carbide coating films, our silicon carbide ceramic wafer boat is favored by the European and American markets for their high cost-effectiveness and excellent quality, and are widely used in advanced semiconductor manufacturing processes. VeTek Semiconductor is committed to establishing long-term and stable cooperative relationships with global customers, and especially hopes to become your reliable semiconductor process partner in China.