MOCVD SiC Coated Susceptor

Technical Parameters

CVD SIC FILM CRYSTAL STRUCTURE

Product Definition and Composition

The VETEK MOCVD SiC Coated Susceptor is a premium wafer-carrying component engineered specifically for the epitaxial processing of third-generation semiconductors, such as GaN and SiC. This product integrates the superior physical properties of two high-performance materials:

High-Purity Graphite Substrate: Manufactured using isostatic pressing technology to ensure the base material possesses exceptional structural integrity, high density, and thermal processing stability.

CVD SiC Coating: A dense, stress-free silicon carbide (SiC) protective layer is grown on the graphite surface through advanced Chemical Vapor Deposition (CVD) technology.

Why VETEK is Your Yield Guarantee

Ultimate Precision in Thermal Uniformity Control: Unlike conventional carriers, VETEK susceptors achieve highly synchronized heat transfer across the entire surface through nanometer-scale precision control of coating thickness and thermal resistance. This sophisticated thermal management effectively minimizes wavelength standard deviation (STD) on the wafer surface, significantly boosting both single-wafer quality and overall batch consistency.

Long-term Protection with Zero Particle Contamination: In MOCVD reaction chambers containing highly corrosive gases, ordinary graphite pedestals are prone to particle flaking. VETEK’s CVD SiC coating possesses exceptional chemical inertness, acting as an impenetrable shield that seals graphite micropores. This ensures total isolation of substrate impurities, preventing any contamination of the GaN or SiC epitaxial layers.

Exceptional Fatigue Resistance and Service Life: Thanks to VETEK’s proprietary interface treatment process, our SiC coating achieves an optimized thermal expansion match with the graphite substrate. Even under high-frequency thermal cycling between extreme temperatures, the coating maintains superior adhesion without peeling or developing micro-cracks. This significantly reduces the frequency of spare part maintenance and lowers your total cost of ownership.

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