Focus ring for Etching

Monocrystalline silicon etching rings are essential components in semiconductor etching processes by maintaining plasma environment stability, protecting equipment and wafers, optimizing resource utilization and adapting to advanced process requirements. Its performance directly affects the yield and cost of chip manufacturing.

The etched Focus Ring, Electrode and ETC (Edge Temperature Controller) are the core consumables to ensure plasma uniformity, temperature control and process repeatability. These components are precisely assembled in the vacuum chamber of the CVD, etching and film equipment and directly determine the accuracy and yield of the etching from edge to center of the wafer.

In response to the stringent demand for material properties in high-end manufacturing processes, Veteksemi innovates by using high-purity Monocrystalline Silicon with a resistivity of 10-20Ω ·cm to manufacture focusing rings and supporting consumables. Through collaborative optimization of material science, electrical design and thermodynamics, VeteKsemi is able to manufacture focusing rings and supporting consumables. Comprehensively surpass traditional Quartz solutions to achieve breakthrough improvements in longevity, accuracy and cost effectiveness.

Core material comparison and resistivity optimization

Monocrystalline silicon VS. Quartz

Product core advantage

1. Atomic level process accuracy

Resistivity optimization + ultra-precision polishing (Ra <0.1μm) eliminates micro-discharge and particle contamination to meet SEMI F47 standards.

The dielectric loss (tanδ <0.001) is highly matched to the wafer dielectric environment, avoiding edge electric field distortion and supporting 3D NAND 89.5°±0.3° vertical deep hole etching.

2. Intelligent system compatibility

Integrated with ETC edge temperature control module, the cooling air flow is dynamically adjusted by thermocouple and AI algorithm to compensate chamber thermal drift.

Support customized RF matching network, suitable for mainstream machines such as AMAT Centura, Lam Research Kiyo and ICP/CCP plasma sources.

3. Comprehensive cost-effectiveness

The life of monocrystalline silicon is 275% longer than that of quartz, the maintenance cycle is more than 3,000 hours, and the comprehensive cost of ownership (TCO) is reduced by 30%.

Resistivity gradient customization service (5-100Ω ·cm), precisely matching the customer process window (such as GaN/SiC wide band gap material etching).

The effect of resistivity

Product Commercial Terms

Minimum Order Quantity	1 set
Price	Contact for Customized Quotation
Packaging Details	Standard export package
Delivery Time	Delivery Time: 30-35 Days After Order Confirmation
Payment Terms	T/T
Supply Ability	600 sets/Month