Quartz Wafer Boats

Quartz wafer boats are indispensable precision tools in the semiconductor manufacturing process. It plays a vital role in the high-temperature diffusion process and is widely used in LEDs, solar cells, traditional semiconductor devices, diodes and other fields. In these applications, the main function of the wafer boat is to stably carry and accurately place semiconductor wafers to ensure that the wafers are evenly heated in the high-temperature diffusion furnace, thereby achieving key process steps such as doping or oxidation. Its excellent physical properties make quartz wafer boat the cornerstone of high-performance semiconductor devices.

Key Material Advantages

Constructed from high-purity fused quartz, Quartz Wafer Boats offer a combination of superior thermal, chemical, and electrical characteristics that are critical for demanding semiconductor applications:

● Low thermal expansion coefficient

Quartz material has an extremely low thermal expansion coefficient, which means that the size and shape of the wafer boat can remain highly stable under extreme temperature changes. This is crucial to prevent the wafer from deforming or cracking due to thermal stress in high-temperature processes, ensuring the accuracy and consistency of each diffusion process.

● High temperature stability

Quartz can maintain its structural integrity and chemical stability at extremely high temperatures and is not easy to soften or deform. This allows quartz wafer boats to withstand the harsh environment of thousands of degrees Celsius in the semiconductor diffusion process, ensuring the continuity and reliability of the process.

● Excellent insulation

Quartz is an excellent electrical insulator. In semiconductor processes, the insulation property can effectively prevent unnecessary charge accumulation or arc discharge, thereby protecting sensitive semiconductor devices from damage and ensuring the safety of the process.

● Excellent chemical stability and transparency

Quartz has excellent chemical inertness and is not easy to react with chemical gases in the diffusion furnace or substances on the surface of the wafer, thereby avoiding impurity contamination and ensuring product purity. In addition, its optical transparency also has potential advantages in certain specific monitoring or optical detection processes.

Applications：

● LED Chip Manufacturing

● Solar Cell Diffusion and Doping

● Semiconductor IC Fabrication

● Battery and Diode Processing

● Thermal Oxidation & LPCVD Furnaces

Why Choose Our Quartz Wafer Boat?

● Crafted from high-purity synthetic quartz

● Customizable sizes for 2-inch to 12-inch wafers

● Excellent dimensional precision and smooth surface finish

● Compatible with all major diffusion furnace systems

Veteksemicon products shop