Products

Aluminum Oxide Ceramics

Veteksemicon is a leading company focused on manufacturing Aluminum Oxide Ceramics. They have a strong R&D team and emphasize continuous innovation to overcome technical challenges and enhance the technology of ceramic aluminum oxide. By introducing advanced production equipment and implementing a strict quality management system, they ensure that every step, from raw material procurement to final products, meets high-quality standards. Customer satisfaction is their priority, and they strive to provide superior Aluminum Oxide Ceramic solutions to global customers, aiming to create long-term value for their success.


The Aluminum Oxide Ceramic of Veteksemicon has following prominent advantages:


1. excellent insulating properties

Ceramic aluminum oxide have high resistivity and excellent insulating properties, can effectively isolate and protect semiconductor devices, prevent current leakage and interference in the circuit, to ensure the stability and reliability of the equipment.


2. Excellent high temperature resistance

Aluminum Oxide Ceramic are able to work stably in high temperature environments, and can usually withstand temperatures of hundreds of degrees Celsius, which is very important for semiconductor equipment that requires long-time high-temperature operation of the components.


3. good chemical stability

Ceramic aluminum oxide has good chemical inertia, acid and alkali and other chemicals have a high resistance to corrosion, which makes it in the semiconductor manufacturing process is not easy to be chemically eroded, to help maintain the long-term stability of the equipment and service life.


4. Excellent mechanical properties

Despite being a ceramic material, Ceramic aluminum oxide also has relatively high mechanical strength and hardness, and are able to withstand a certain degree of physical impact and stress, which is particularly suitable for semiconductor equipment components requiring high precision and high stability.


5. Good processability and precision

Aluminum Oxide Ceramic can be molded, sintered and processed into complex shapes and precise sizes of components with high surface finish, suitable for the manufacture of semiconductor equipment in the package substrate, insulation layer and other key components.


The applications of Veteksemicon's Aluminum Oxide Ceramic materials in the solar and semiconductor industries mainly include:


1. Cavity protection material

Aluminum Oxide Ceramic have excellent chemical stability, thermal stability, mechanical properties, and electrical properties, which makes Aluminum Oxide Ceramic effective as protective materials to protect equipment from chemical, thermal, mechanical and electrical damage, ensuring long-term stable operation and efficient operation of the equipment.


2. Plasma equipment

Aluminum Oxide Ceramic have excellent high temperature resistance, chemical stability, electrical insulation and good mechanical properties, so they are widely used as structural materials and protective materials in plasma equipment to ensure stable and reliable operation of equipment in complex working environments.


3. Wafer polishing process

Ceramic aluminum oxide has high hardness and good thermal stability and electrical insulation, so they are very suitable as polishing disc materials in wafer polishing processes. Ceramic Aluminum Oxide can protect wafers from mechanical wear and chemical erosion, thereby improving the accuracy and stability of polishing.


Aluminum Oxide Ceramic Product Parts


View as  
 
Alumina Ceramic Vacuum Chuck

Alumina Ceramic Vacuum Chuck

VeTek Semiconductor is a professional Alumina Ceramic Vacuum Chuck manufacturer and factory in China. Alumina Ceramic Vacuum Chuck uses high-purity aluminum oxide ceramics with excellent heat resistance, chemical resistance and mechanical strength. It is mainly used to fix and support wafers and substrates. It is a high-performance equipment for semiconductor processing. Welcome your further inquiries.
Wafer Handling Robotic Arm

Wafer Handling Robotic Arm

Vetek Semiconductor thermal spraying technology plays a vital role in the application of wafer handling robotic arms, especially in semiconductor manufacturing environments that require high precision and high cleanliness. This technology significantly improves the durability, reliability and work efficiency of the equipment by coating special materials on the surface of the wafer handling robotic arm. Welcome to inquiry us.

Choose high-purity Aluminum Oxide Ceramics from Veteksemicon—reliable insulative and structural materials for semiconductor tools.


Veteksemicon supplies aluminum oxide (Al₂O₃) ceramics ranging from 95% to 99.8% purity, known for their high dielectric strength, excellent plasma resistance, and mechanical robustness. Commonly used in electrostatic chucks, chamber liners, support blocks, and isolation rings, alumina ceramics are vital in etching, ion implantation, and oxidation processes.


Our ceramics feature dense microstructures and minimal porosity, ensuring long-term stability and minimal particle generation. Available for both 200mm and 300mm production lines, we offer high-precision CNC machining for custom geometries. Whether you're replacing parts or designing new tools, Veteksemicon ensures fast delivery and stable performance.


Need help with material selection or specs? Visit Veteksemicon’s Aluminum Oxide Ceramics page or contact our engineers today.


As a professional Aluminum Oxide Ceramics manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable Aluminum Oxide Ceramics made in China, you can leave us a message.
X
We use cookies to offer you a better browsing experience, analyze site traffic and personalize content. By using this site, you agree to our use of cookies. Privacy Policy
Reject Accept