PZT Piezoelectric Wafers (PZT on Si/SOI)

1. Technical Architecture

Our wafers feature a sophisticated multi-layer stack structure designed to ensure optimal adhesion, conductivity, and piezoelectric response during complex MEMS processing:

 ● Top Electrode (Key Layer): Pt (Platinum).

● Piezo Layer (Core Layer): PZT.

● Intermediate Layers: Includes Buffer Layer, Bottom Electrode, and Adhesion Layer to optimize grain orientation and structural stability.

● Substrate: Compatible with Si or SOI wafers.

2. Quality Assurance & Microstructure Analysis

We ensure high reliability through rigorous technical characterization:

 ● SEM Analysis: Scanning Electron Microscopy (SEM) images reveal a dense, crack-free surface morphology with uniform grain size distribution, ideal for high-reliability MEMS applications.

 ● XRD Characterization: X-Ray Diffraction (XRD) patterns confirm pure perovskite phase formation with a strong (100) preferred orientation, ensuring maximal piezoelectric performance coefficients.

3. Technical Specifications (Characteristics)

4. Core Applications

 ● Piezoelectric Micromachined Ultrasonic Transducers (pMUT): High-frequency miniaturized arrays for fingerprint sensors, gesture recognition, and automotive ultrasonic radar.

 ● Communication: Key for manufacturing FBAR or SAW filters in 5G/6G to achieve wider bandwidth and lower insertion loss.

 ● Acoustic MEMS: Provides powerful transient response for MEMS speakers and improves the Signal-to-Noise Ratio (SNR) for MEMS microphones.

 ● Precision Fluid Control: High-speed vibration via d31 mode for nanoliter-scale precise control of droplet volume in inkjet printheads.

 ● Medical & Beauty (Micro-pumping): Drives medical nebulizers or cosmetic ultrasonic pumps with high reliability and compact size.

5. Customization Services

In addition to standard deposition on Si wafers, we also provide custom deposition services:

 ● Film & Thickness Customization: Deposition of specific film types and custom thicknesses according to design requirements.

 ● OEM Foundry: Acceptance of wafers supplied from customers for high-quality piezoelectric thin-film growth.

 ● SOI Substrate Support: Specialized deposition on SOI wafers with the following specifications: