Industry News

With the global energy transition, the AI revolution, and the wave of new-generation information technologies, silicon carbide (SiC) has rapidly advanced from being a "potential material" to a "strategic foundational material" due to its exceptional physical properties.

In semiconductor high-temperature processes, the handling, supporting, and thermal treatment of wafers rely on a special supporting component—the wafer boat. As process temperatures rise and cleanliness and particle control requirements increase, traditional quartz wafer boats gradually reveal issues such as short service life, high deformation rates, and poor corrosion resistance.

For industrial-scale production of silicon carbide substrates, the success of a single growth run is not the end goal. The real challenge lies in ensuring that crystals grown across different batches, tools, and time periods maintain a high level of consistency and repeatability in quality. In this context, the role of tantalum carbide (TaC) coating goes beyond basic protection—it becomes a key factor in stabilizing the process window and safeguarding product yield.