CVD Tantalum Carbide(TaC) Coated Susceptor

Key Features

Applications

Typical applications include:

• SiC Epitaxial Growth

• GaN MOCVD Epitaxy

• AlN Epitaxial Growth

• Third-Generation Semiconductor Manufacturing

• High-Power Electronics

• RF Devices

• MicroLED Production

• Research and Pilot Production Systems

Compatible Equipment

Compatible platforms include:

• Aixtron

• LPE

• Veeco

• AMEC

• NuFlare

• Custom CVD & MOCVD Reactors

Also available:

• Wafer Carriers

• Planetary Susceptors

• Barrel Susceptors

• Rotation Disks

• Half-Moon Parts

• Cover Plates

• Graphite Assemblies

• Custom Thermal Field Components

Technical Specifications

Frequently Asked Questions

1. What is a CVD TaC Coated Susceptor?

A high-purity graphite component protected by a dense CVD TaC coating used as the wafer carrier during epitaxial growth.

2. Why use TaC coating instead of SiC coating?

TaC offers higher temperature resistance, superior chemical stability, and longer service life.

3. Which semiconductor processes use TaC-coated susceptors?

SiC epitaxy, GaN MOCVD, AlN epitaxy, and other high-temperature crystal growth processes.

4. Can VETEK manufacture customized susceptors?

Yes. We provide customized designs based on customer drawings and process requirements.

5. Which reactor brands are supported?

Aixtron, LPE, Veeco, AMEC, NuFlare, and other mainstream systems.